70NANB24H277
Cooperative Agreement
Overview
Grant Description
Purpose: Steam instruments will implement a rapid and accurate high-resolution ion microscopy technology on a prototype instrument and apply it to materials characterization challenges of direct interest to the semiconductor industry, such as inaccurate dopant concentration determinations, incorrect spatial positioning of dopants, compositional identification ambiguities.
Activities to be performed: The awardee will develop a high-resolution ion microscope product to enable rapid and accurate nanoscale characterization.
Expected outcomes: Instrument will make improvements in composition-versus-structure analysis.
Intended beneficiaries: U.S. semiconductor industry and researchers.
Subrecipient activities: The recipient plans to subaward funds for specimen preparation, experimentation and analysis.
Activities to be performed: The awardee will develop a high-resolution ion microscope product to enable rapid and accurate nanoscale characterization.
Expected outcomes: Instrument will make improvements in composition-versus-structure analysis.
Intended beneficiaries: U.S. semiconductor industry and researchers.
Subrecipient activities: The recipient plans to subaward funds for specimen preparation, experimentation and analysis.
Awardee
Funding Goals
TO EXPLORE THE TECHNICAL MERIT OR FEASIBILITY OF AN INNOVATIVE IDEA OR TECHNOLOGY WITH THE AIM OF DEVELOPING A VIABLE PRODUCT OR SERVICE THAT WILL BE INTRODUCED TO THE COMMERCIAL MICROELECTRONICS MARKETPLACE.
Grant Program (CFDA)
Awarding / Funding Agency
Place of Performance
Madison,
Wisconsin
53703-2955
United States
Geographic Scope
Single Zip Code
Steam Instruments was awarded
Cooperative Agreement 70NANB24H277
worth $289,529
from the National Institute of Standards and Technology in October 2024 with work to be completed primarily in Madison Wisconsin United States.
The grant
has a duration of 2 years 5 months and
was awarded through assistance program 11.042 CHIPS Research and Development.
The Cooperative Agreement was awarded through grant opportunity Small Business Innovation Research (SBIR) Program for CHIPS For America – CHIPS Metrology.
SBIR Details
Research Type
SBIR Phase I
Title
Rapid and Accurate High-Resolution Ion Microscopy for Semiconductor Metrology
Abstract
This Small Business Innovation Research project aims to develop new ultra high-speed nanoprobes. This new and critically needed technology will enhance the ability for semiconductor failure analysis engineers to locate and analyze soft electrical faults, which occur in the most advanced semiconductors and are otherwise difficult to detect.
Topic Code
2
Solicitation Number
2024-SBIR-CHIPS-01
Status
(Ongoing)
Last Modified 10/4/24
Period of Performance
10/1/24
Start Date
3/30/27
End Date
Funding Split
$289.5K
Federal Obligation
$0.0
Non-Federal Obligation
$289.5K
Total Obligated
Activity Timeline
Additional Detail
Award ID FAIN
70NANB24H277
SAI Number
70NANB24H277_0
Award ID URI
EXE
Awardee Classifications
Small Business
Awarding Office
1333ND DEPT OF COMMERCE NIST
Funding Office
1333ND DEPT OF COMMERCE NIST
Awardee UEI
LXQ8L5NBEHT6
Awardee CAGE
89E07
Performance District
WI-02
Senators
Tammy Baldwin
Ron Johnson
Ron Johnson
Modified: 10/4/24