70NANB24H275
Cooperative Agreement
Overview
Grant Description
Purpose: SigRay Inc seeks to develop a novel linear accumulation X-ray source (LAXS) based on the proposing company's existing ultrahigh brightness micro-structured X-ray source to achieve a >30x brightness gain over leading X-ray sources to enable laboratory transmission critical dimension small angle X-ray scattering (T-CDSAXS).
Activities to be performed: Develop a novel linear accumulation X-ray source.
Expected outcomes: The outcomes will provide 30x higher performance than the high brightness rotating anode X-ray source used in existing laboratory critical dimension small angle scattering.
Intended beneficiaries: Researchers and manufacturers of semiconductor transistors.
Subrecipient activities: The recipient does not intend to subaward funds.
Activities to be performed: Develop a novel linear accumulation X-ray source.
Expected outcomes: The outcomes will provide 30x higher performance than the high brightness rotating anode X-ray source used in existing laboratory critical dimension small angle scattering.
Intended beneficiaries: Researchers and manufacturers of semiconductor transistors.
Subrecipient activities: The recipient does not intend to subaward funds.
Awardee
Funding Goals
TO EXPLORE THE TECHNICAL MERIT OR FEASIBILITY OF AN INNOVATIVE IDEA OR TECHNOLOGY WITH THE AIM OF DEVELOPING A VIABLE PRODUCT OR SERVICE THAT WILL BE INTRODUCED TO THE COMMERCIAL MICROELECTRONICS MARKETPLACE.
Grant Program (CFDA)
Awarding / Funding Agency
Place of Performance
Concord,
California
94520-5345
United States
Geographic Scope
Single Zip Code
Sigray was awarded
Cooperative Agreement 70NANB24H275
worth $289,703
from the National Institute of Standards and Technology in October 2024 with work to be completed primarily in Concord California United States.
The grant
has a duration of 2 years 6 months and
was awarded through assistance program 11.042 CHIPS Research and Development.
The Cooperative Agreement was awarded through grant opportunity Small Business Innovation Research (SBIR) Program for CHIPS For America – CHIPS Metrology.
SBIR Details
Research Type
SBIR Phase I
Title
Development of a Novel Linear Accumulating X-ray Source (LAXS) for CDSAXS
Abstract
Continued scaling has driven a critical need for laboratory-based critical dimension x-ray scattering (CD-SAXS). To date, CD-SAXS has been limited by the relatively low brightness of laboratory x-ray sources, which are limited by melting or evaporation of the anode materials under electron bombardment. We proposed an x-ray source whose development will incorporate a two-pronged strategy to significantly increase the x-ray source brightness: 1) linear accumulation and 2) optimized x-ray source spot size. Linear accumulation is the sequential arrangement of specially modified x-ray sources and opcs such that the x-ray beam from one source focuses onto the x-ray spot of the next, thus adding to the output flux. Through this proposal, we expect to provide a significant improvement of over 30X in performance for CDSAXS compared to conventional x-ray sources on the market.
Topic Code
6
Solicitation Number
2024-SBIR-CHIPS-01
Status
(Ongoing)
Last Modified 10/4/24
Period of Performance
10/1/24
Start Date
4/30/27
End Date
Funding Split
$289.7K
Federal Obligation
$0.0
Non-Federal Obligation
$289.7K
Total Obligated
Activity Timeline
Additional Detail
Award ID FAIN
70NANB24H275
SAI Number
70NANB24H275_0
Award ID URI
EXE
Awardee Classifications
Small Business
Awarding Office
1333ND DEPT OF COMMERCE NIST
Funding Office
1333ND DEPT OF COMMERCE NIST
Awardee UEI
H5UJCPYHJM34
Awardee CAGE
70Q59
Performance District
CA-10
Senators
Dianne Feinstein
Alejandro Padilla
Alejandro Padilla
Modified: 10/4/24