70NANB24H068

Purpose: AMAG CONSULTING, LLC project will be to increase the applicability of SIMUSEM to more customer's use cases by addition/integration of meshing, charging and rough surface generation features. This will improve process control, hybrid metrology comparisons involving SEM, SEM imaging condition optimization, limits/feasibility studies, faux image generation for AI training, calibration of analytical models, and fundamental understanding of signal generation, all critical for successful metrology of future shrinking devices.

Activities to be performed: During Phase I, a charging model will be implemented in SIMUSEM with an inclusion of charging model and rough surface capabilities necessary for accurate simulation of pertinent dielectric materials which charge under SEM.

Expected outcomes: Technology development under this Phase I will result in improving process control, hybrid metrology comparisons involving SEM, SEM imaging condition optimization, limits/feasibility studies, faux image generation for AI training, calibration of analytical models, and fundamental understanding of signal generation, all critical for successful metrology of future shrinking devices.

Intended beneficiaries: The awardee's intended beneficiaries are the semiconductor industry. They will be able to refine SEM metrology of smaller, more energy-efficient chips for commercial electronics. Accurate/precise SEM metrology is crucial for correctly understanding and tightening produced feature size distributions for process control or defectivity for the billions of on-chip transistors.

Subrecipient activities: A consultant will be used in Phase I that has expertise in improving speed by multi-threading and distributed processing and also developing software installation systems.

Amag Consulting

TO EXPLORE THE TECHNICAL MERIT OR FEASIBILITY OF AN INNOVATIVE IDEA OR TECHNOLOGY WITH THE AIM OF DEVELOPING A VIABLE PRODUCT OR SERVICE THAT WILL BE INTRODUCED TO THE COMMERCIAL MARKETPLACE. TO STRENGTHEN THE ROLE OF INNOVATIVE SMALL BUSINESS CONCERNS (SBCS) IN FEDERALLY-FUNDED RESEARCH OR RESEARCH AND DEVELOPMENT (R/R&D) AND TO: (1) STIMULATE TECHNOLOGICAL INNOVATION; (2) USE SMALL BUSINESS TO MEET FEDERAL R/R&D NEEDS; (3) FOSTER AND ENCOURAGE PARTICIPATION BY SOCIALLY AND ECONOMICALLY DISADVANTAGED SMALL BUSINESSES AND BY WOMEN-OWNED SMALL BUSINESSES IN TECHNOLOGICAL INNOVATION; AND (4) INCREASE PRIVATE SECTOR COMMERCIALIZATION OF INNOVATIONS DERIVED FROM FEDERAL R/R&D, THEREBY INCREASING COMPETITION, PRODUCTIVITY, AND ECONOMIC GROWTH.

11.620 - Science, Technology, Business and/or Education Outreach

National Institute of Standards and Technology (NIST) [DOC]

Schenectady, New York 12303-5704 United States

Single Zip Code

Small Business Innovation Research (SBIR) Program Phase I (2024-NIST-SBIR-01)

Amendment Since initial award the End Date has been extended from 11/15/24 to 12/15/24.