DOCUMENT

11-0060-22 1300999315 SOW - Final.docx

OVERVIEW

Original Source
Contract Opportunity
Date Originally Posted
May 20, 2022, 8:18 a.m.
Type
.docx
Size
0.01MB
Profiled People
None

DOCUMENT PREVIEW

EXTRACTED TEXT

Comprehensive Support Agreement for Oxford instruments Plasma Instruments

OVERVIEW/BACKGROUND. The Naval Research Laboratory (NRL) requires contract support to purchase a comprehensive maintenance agreement for eight Oxford Instruments Plasma Instruments. The agreement will include unlimited on-site service visits, repairs as needed, and annual preventative maintenance and calibration visits.

SCOPE

1.0 The following services are required, covering the Oxford Instruments below:

Model

Serial #

Description

Open Load PP80 ICP65

220290

Open Load Fluorine based Inductively Coupled Plasma Reactive Ion Etcher

2-6 etcher System 100 ICP65

219933

II-VI Chlorine based Inductively Coupled Plasma Reactive ion Etcher

3-5 etcher PP100 Cobra 300

220289

III-V Chlorine based Inductively Coupled Plasma Reactive ion Etcher

DRIE PP100 ICP 180

220052

Fluorine based Inductively Coupled Plasma Reactive Ion Etcher

FlexAl

219963

Atomic layer Deposition System

PP100 PECVD

220291

Plasma Enhanced Chemical Vapor Deposition system

HT-PECVD Nanofab 1000

220215

Plasma Enhanced Chemical Vapor Deposition system

metal etch PP100 Cobra

220354

Chlorine mixed chemistry Inductively Coupled Plasma Reactive ion Etcher

REQUIREMENTS

1.01 Telephone Support. Help Desk Phone Support from 8:30 AM to 8:00PM EST, providing access to Oxford’s Call Center, Call logging and Technical Support.

1.02 Labor. In the event of a system failure, an Oxford Instruments Engineer will visit site. Within 3 business days, but no more than a maximum of five business days from the date of decision to go on-site.

1.03 Parts. In the event of a component malfunction, replacement part(s) will be shipped priority over night to the site. Only parts that were originally supplied by Oxford Instruments will be covered. Replacement parts may be service exchange or new items, shipping charges are included. Rotary pumps, spares and consumables are not included.

1.04 Performance Maintenance. Annually, an Oxford Instruments Engineer will visit site to perform Performance Maintenance on your system. This will ensure optimum system performance by replacing typical components that wear out, record baseline parameters, verify system performance and reduce unplanned outages. The materials in the Performance Maintenance Kit are included.

ADDITIONAL INFORMATION

1.05 PLACE OF PERFORMANCE. The Services detailed in the Service Agreement are to be performed at the Nano Science Institute Bldg. 250 4555 Overlook Ave. SW Washington DC.

1.06PERIOD OF PERFORMANCE. A base year and four option years.

1.07Vendor shall only use Oxford Instruments America, Inc. trained and certified service engineers.