SUSS ACS200 Control System Upgrade

Title: SUSS ACS200 Control System Upgrade Combined Sources Sought/ Notice of Intent to Sole Source

*****THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE***.

BACKGROUND

The National Institute of Standards and Technology (NIST) Center for Nanoscale Science and Technology (CNST) enables science and industry by providing essential measurement methods, instrumentation, and standards to support all phases of nanotechnology development, from discovery to small production at the Gaithersburg, MD campus. The CNST cleanroom supports numerous NIST and external projects, including the NIST on a chip nanophotonic efforts, that utilize complex processing involving aggressively scaled patterning, etching and deposition and numerous CHIP funded research projects. A high-quality pattern developing and resist coating are essential prerequisites for the precision nanoscale lithography required for micro/nano fabrication.

Precision nanoscale lithographic imaging is a critical part of the CNST NanoFab mission. The NanoFab has a need to apply these highly controlled processes repeatedly to every target substrate throughout the entire period of projects and independent from the influence of operators. CNST has a tool which can satisfy all these requirements, and it is the ACS200 Microlithography Cluster. Currently this tool is not operational due to the broken control computer. The existing computer is also too old and Suss no longer offers the same replacement. To work with the newer computer, electronic controller also needs to be upgraded and re-configurated. CNST has a strong need to repair/upgrade this micro-lithography cluster system, an automated ( cassette-to-cassette ) cluster system that has the capability to provide a highly controllable, repeatable, and automated process for spin coating, spray coating, developing and hot plate curing of organic or dielectric films. The reviving of this system is highly demanded by broad user groups.

NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above, in addition to the following essential requirements

Line Item 0001: Add new Tool Controller Panel and PC with a proper operating system to NIST's existing SUSS ASC200 Gen3 Microlithography cluster that meet or exceed the following technical specifications.

1. Technical Specifications
2. All materials shall be new; rebuilt system components will not be considered.
3. All work must be performed by OEM trained personnel qualified to work on SUSS MicroTec ACS200 Microlithography cluster system.
4. The installation, setup, and acceptance will take place at the NIST CNST NanoFab cleanroom in Gaithersburg, MD.
5. Sequences and Recipes: The new computer and controller system shall be configured to perform programmable sequences and recipes for individual and sequential processes compatible with the current SUSS ACS200 GEN3 Microlithography cluster located in NIST CNST cleanroom.
6. Substrate handling: The new computer and controller system shall handle, automatically and manually, substrates with the specified wafer diameters and the following thickness ranges or larger:
   1. 100 mm diameter: 0.5 mm 1 mm thick.
   2. 150 mm diameter: 0.5 mm 1.5 mm thick.
7. Software: The new computer and controller system shall be configured to perform all the existing baseline sequences and recipes in automatic mode and be able to execute all existing manual functions in all modules (spin coater, bake/chill stations, spray coater and developer) under service mode.
8. The new computer and controller system shall support all the existing utility monitoring and interlock functions or have more advanced capabilities.
9. Vendor shall transfer the old data files from the old computer to the new computer.
10. Vendor shall provide all parts and labor necessary to supply and install the upgrades.
11. Vendor shall provide maintenance and operations training for the new system.
12. Vendor shall provide updated tool manual and schematics corresponding to the new computer and controller system.

NIST conducted market research from April 2025 November 2025 by, speaking with colleagues, performing internet searches, and speaking with vendors to determine what sources could meet NIST's minimum requirements. The results of that market research revealed that only Suss Microtec (UEI: WEARZ3WMNKL9) can meet all the Governments minimum requirements.

HOW TO RESPOND TO THIS NOTICE

In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice. Please note that to be considered for award under any official solicitation, the entity must be registered and active in SAM at the time of solicitation response.

• Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company's Unique Entity ID (UEI).
• Details about what your company is capable of providing that meets or exceeds NIST's minimum requirements.
• Whether your company is an authorized reseller of the product or service being cited and evidence of such authorization.
• Identify any aspects of the description of the requirements in the BACKGROUND section above that could be viewed as unduly restrictive or create unnecessary barriers that adversely affect your firm's ability to fully participate in a procurement for such services and explain why. Please offer suggestions for how the requirements could be organized or structured to encourage the participation of small businesses.
• For the NAICS code
• Indicate whether your company is (a) a small business or (b) other than small business. See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information.
• If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.
• If your firm has existing Federal Supply Schedule contract(s) or other contracts for products or services against which the Department may be able to place orders, identify the contract number(s) and other relevant information.
• Describe your firm's experience (as a prime, subcontractor, or consultant) providing the products or services described in Background section.
• Provide any other information that you believe would be valuable for the Government to know as part of its market research for this requirement.
• Please let us know if you would like to engage to get a better understanding of the requirement or need additional information about the Government's requirement for the products or services described in the Background section.

QUESTIONS REGARDING THIS NOTICE

Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received within 5 Days of this posting. If the Contracting Officer determines that providing a written amendment to this notice to document question(s) received would benefit other potential respondents, the questions would be anonymized, and a written response to such question(s) would be provided via an amendment to this notice.

IMPORTANT NOTES

The information received in response to this notice will be reviewed and considered so that the NIST may appropriately solicit for its requirements in the near future.

This notice should not be construed as a commitment by the NIST to issue a solicitation or ultimately award a contract.

This notice does not obligate the Government to award a contract or otherwise pay for the information provided in response.

This notice is not a request for a quotation. Responses will not be considered as proposals or quotations.

No award will be made as a result of this notice.

NIST is not responsible for any costs incurred by the respondents to this notice.

NIST reserves the right to use information provided by respondents for any purpose deemed necessary and appropriate.

Any organization responding to this notice should ensure that its response is complete and sufficiently detailed to allow the Government to determine the organization's capability.

Respondents are advised that the Government is under no obligation to acknowledge receipt of the information received or provide feedback to respondents with respect to any information submitted.

Thank you for taking the time to submit a response to this request.