Notice of Intent to Sole Source - Maintenance agreement for ASML 5500/100 Wafer Stepper

Background
The National Institute of Standards and Technology (NIST) has issued a notice of intent to sole source a preventative maintenance and service contract for an ASML 5500/100 Wafer Stepper. The equipment is used as shared resources accessible to researchers from industry, academia, NIST, and other government agencies. The service contract is essential to maintain the systems operational 24/7 with minimal interruption in service.

Work Details
The proposed acquisition aims to obtain an annual maintenance service contract covering routine preventative maintenance, emergency services, and repair for one ASML 5500/100 Wafer Stepper. The notice emphasizes that ASML is the Original Equipment Manufacturer (OEM) for the required equipment, and their expertise, experience, and parts availability are essential for maintaining and servicing this tool. NIST conducted market research which revealed that aside from ASML, no other companies have access to the proprietary parts and training required to service the Wafer Stepper. The notice also specifies that it is not a request for quotation, and no solicitation document will be issued. However, sources capable of meeting NIST’s minimum requirements are encouraged to respond by a specified date with relevant information about their capabilities.