Cryopump Compressor

Background
The National Institute of Standards and Technology (NIST) is seeking to procure a cryopump compressor to support its mission in semiconductor metrology. The semiconductor supply chain is complex and interconnected, with a focus on materials and tools used in chip manufacturing, particularly those based on GaN and AlGaN.

NIST aims to address visibility gaps in the semiconductor market and enhance the reliability and performance of power electronics through its CHIPS program. The previous cryopump compressor has failed, necessitating a new unit to ensure continued research and development capabilities.

Work Details
The contractor is required to deliver one Edwards CTI Cryo-Torr Cryopump 8200 Helium Compressor, Model - 8032550G001. The specifications include:
- Compatibility with CTI Cryo-Torr 8, Model 3543849G002
- Electrical power requirements: Three phase, 208/230 VAC 60 Hz
- Water cooled.

Additionally, transportation or related fees at the time of delivery are included but must not exceed specified limits. All items must be new; used or remanufactured equipment will not be accepted.

Period of Performance
Approximately 5 months after the date of award.

Place of Performance
Delivery will occur at the National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305-3328.