CHIPS Direct Electron EBSD   3

Background
The success of US semiconductor manufacturing relies on the ability of the industry to out innovate competitors with new technology and outperform foreign manufacturers with high-yield processing. NIST’s CHIPS Metrology program is tasked with assisting industry by creating new measurement capabilities that enable the development of next generation devices and help manufacturers with metrology solutions that improve the yield of manufacturing processes.

Work Details
The contractor is responsible for delivering and installing the new analytical detector(s) on the existing NIST owned SEM, providing training for the system, providing a hardware and software warranty, and offering extended hardware and software service contracts.
Line Item 0001 Description: SEM Analytical Detector System including Direct Electron EBSD
Quantity: One SEM Analytical Detector System
The contractor will supply a newly manufactured SEM analytical detector that meets or exceeds specific specifications such as detector resolution, active area, energy filtering, sensitivity range, and data collection software capabilities.