Arbitrary Waveform Generator

Background
The National Institute of Standards and Technology (NIST) is conducting a project aimed at improving the semiconductor supply chain's visibility and measurement science. This project, part of the CHIPS metrology program’s Grand Challenge 5, focuses on modeling and simulating semiconductor manufacturing processes.

NIST requires an Arbitrary Waveform Generator (AWG) and a real-time oscilloscope for radiofrequency (RF) metrology to generate and measure complex electrical waveforms used in semiconductor manufacturing, particularly during etching and deposition processes. The goal is to establish traceability for measurement tools to enhance accuracy and consistency in manufacturing, thereby increasing yield.

Work Details
The contract involves the procurement of the following items:

1. **Arbitrary Waveform Generator (AWG)**
- Quantity: One (1)
- Technical Specifications:
- At least two channels generating output voltage waveforms.
- Maximum sampling rate: at least 5 GS/s, ideally 9 GS/s.
- Sufficient memory to store a waveform with at least 1 ms duration at the fastest sampling rate.
- Resolution: at least 12 bits.
- Capability to generate a TTL marker signal.
- Shared clock timing capability with oscilloscope.
- Compatibility with PXIe chassis for future upgrades.
- Output impedance: 50 Ohms.

2. **Real-Time Oscilloscope**
- Quantity: One (1)
- Technical Specifications:
- At least two channels recording input voltage waveforms.
- Maximum sampling rate: at least 5 GS/s, ideally 9 GS/s.
- Sufficient memory to store a waveform with at least 1 ms duration at the fastest sampling rate.
- Resolution: at least 12 bits.
- Shared clock timing capability with AWG.
- Compatibility with PXIe chassis for future upgrades.
- Input impedance: 50 Ohms.

3. **Optional Line Item**
- **PXIe Chassis**
- Quantity: One (1)
- Technical Specifications:
- Capable of accommodating both AWG and oscilloscope with open slots for future instruments or upgrades.

Period of Performance
No later than 10 weeks after receipt of order.

Place of Performance
NIST B