Nanocalorimetry for Semiconductors and Semiconductor Process Metrology
Type: Forecast • Source ID: 64926
Overview
Description
Obtain technical services to support nanocalorimeter-based semiconductor process metrology for atomic layer deposition (ALD). The Contractor shall implement and develop chip-based nanocalorimeter sensors for ALD process diagnostics, including operation and maintenance of ALD equipment, vacuum systems, calorimetric and optical instrumentation, data collection systems, thermal and optical data analysis, thermochemical modeling, deposited film analysis, and preparation of technical materials for NIST review and dissemination.
Est. Value
Min: $250,000
Max: $500,000
Max: $500,000
Est. Award Date
1st quarter FY2027
Future Opp
Source Est. Solicitation Date
1st quarter FY2027
Set Aside
Small Business
Procurement Method
Competed
Forecast Type
New Requirement
Place of Performance
GAITHERSBURG, MD USA
Forecast Source
Department of Commerce
National Institute of Standards and Technology is forecasted to issue a new procurement for Nanocalorimetry for Semiconductors and Semiconductor Process Metrology around 1st quarter FY2027 worth up to $500,000.
Agency
Source Level 1 Agency
Department of Commerce
Source Level 2 Agency
NIST - PROGRAM OFFICE
Source Level 3 Agency
AD for Laboratory Programs
Contacts
Potential Bidders and Partners
Similar Active Opportunities
Additional Detail
Date Published
9/18/26
Date Modified
9/2/26
Additional Notes
Workspace number: REQUIREMENTS-26-4926; Date created: 2026-09-18 00:00:00; Organization unit: NIST - ALP; Months: 0; Years: 2; Anticipated action award type: Delivery/Task Order; IT indicator: N.
Source Forecast ID
64926